Publication date: 1 September 2018Source: Sensors and Actuators A: Physical, Volume 280Author(s): Bedirhan İlik, Aziz Koyuncuoğlu, Özlem Şardan-Sukas, Haluk KülahAbstractThis paper reports the development of a single cantilever thin film PLD-PZT transducer prototype. The device was experimentally characterized by attaching it on an acoustically vibrating membrane resembling the behavior of the eardrum. Acceleration characteristic of the sensor attached on the membrane was obtained by using a Laser Doppler Vibrometer (LDV) as the output voltage was measured by an oscilloscope. A voltage output of 114 mV was obtained, when the device was excited at 110 dB Sound Pressure Level (SPL) at 1325 Hz. This is the highest value for a thin film piezoelectric transducer in the literature to ...
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